Jung, Joontaek
Bastien, Jean-Claude
Lefevre, Aude
Benedetto, Kevin
Dejaeger, Rémy
Blard, François
Fain, Bruno https://orcid.org/0000-0002-8235-8414
Funding for this research was provided by:
ANR
Article Title: Wafer-level experimental study of residual stress in AlN-based bimorph piezoelectric micromachined ultrasonic transducer
Journal Title: Engineering Research Express
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-09-30
Date Accepted: 2020-10-14
Online publication date: 2020-10-22