Taoka, Yuki http://orcid.org/0000-0002-2897-1971
Hayashi, Terumichi
Hemthavy, Pasomphone http://orcid.org/0000-0001-7709-2642
Takahashi, Kunio http://orcid.org/0000-0002-8915-6145
Saito, Shigeki http://orcid.org/0000-0001-5663-975X
Funding for this research was provided by:
Grants-in-Aid for Scientific Research of the Ministry of Education, Culture, Sports, Science and Technology of Japan (16H04297)
Article Title: Development of a bipolar electrostatic chuck with a compliant beam-array assembly having four 3D-printed layers for large film handling
Journal Title: Engineering Research Express
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-10-25
Date Accepted: 2022-01-11
Online publication date: 2022-01-21