Taherian, Sina http://orcid.org/0000-0001-5873-3635
Gholinataj-Jelodar, Ehsan
Article Title: Structural design and analytical study of a new polysilicon tunable microactuator for measurement of different resonance frequencies
Journal Title: Engineering Research Express
Article Type: paper
Copyright Information: © 2023 IOP Publishing Ltd
Publication dates
Date Received: 2023-03-23
Date Accepted: 2023-06-22
Online publication date: 2023-07-10