Taoka, Yuki https://orcid.org/0000-0002-2897-1971
Ryo, Tomohiro
Xu, Sanchuan https://orcid.org/0000-0001-8429-1789
Saito, Shigeki https://orcid.org/0000-0001-5663-975X
Funding for this research was provided by:
Japan Society for the Promotion of Science (20H02112)
Article Title: Electrostatic chuck having compliant multi-beam structures with rotatable bipolar pad-shaped electrodes
Journal Title: Engineering Research Express
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2023-03-22
Date Accepted: 2024-01-09
Online publication date: 2024-01-22