Hampel, Nils Alexander https://orcid.org/0000-0003-1559-6268
Seifert, Marietta https://orcid.org/0000-0001-5106-9903
Leszczynska, Barbara
Gemming, Thomas https://orcid.org/0000-0002-7353-595X
Funding for this research was provided by:
BMWI (03ET1589 A)
DFG (470028346)
Article Title: Angle-dependent ion-beam etching of RuAl thin films for structuring GHz-frequency electronics
Journal Title: Engineering Research Express
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-05-29
Date Accepted: 2024-09-10
Online publication date: 2024-10-09