Funding for this research was provided by:
NSTC (113-2622-8-A49 -012-SB)
NSTC T-Star Center Project: Future Semiconductor Technology Research Center (NSTC 113-2634-F-A49-008)
Article Title: Demonstration of GaN HEMT with Cu-based Ti/TiN/Cu Ohmic metal and TiN/Cu gate metal: comparison with Au-based device
Journal Title: Engineering Research Express
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-10-03
Date Accepted: 2025-01-27
Online publication date: 2025-02-04