Ha, Thi Dep https://orcid.org/0000-0003-1414-7022
Article Title: A TPoS MEMS resonator with enhanced anchor quality factor exploiting one-dimensional phononic crystal tether
Journal Title: Engineering Research Express
Article Type: paper
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Publication dates
Date Received: 2025-04-29
Date Accepted: 2025-08-07
Online publication date: 2025-08-20