Mistry, Kissan https://orcid.org/0000-0001-9593-6896
Jones, Alexander https://orcid.org/0000-0003-2270-2698
Kao, Manfred
Yeow, Travis Wen-Kai
Yavuz, Mustafa
Musselman, Kevin P https://orcid.org/0000-0002-9752-0015
Funding for this research was provided by:
Mitacs (Globalink Research Program)
Natural Sciences and Engineering Research Council of Canada (Discovery Accelerator RGPAS-2017-507977)
Article Title: In-situ observation of nucleation and property evolution in films grown with an atmospheric pressure spatial atomic layer deposition system
Journal Title: Nano Express
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-04-06
Date Accepted: 2020-05-28
Online publication date: 2020-06-09