Rodt, S https://orcid.org/0000-0001-6275-4965
Reitzenstein, S https://orcid.org/0000-0002-1381-9838
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (Re2974/12-1)
European Commission (ITN QUDOTTECH)
European Association of National Metrology Institutes (EMPIR SIQUST)
Article Title: High-performance deterministic in situ electron-beam lithography enabled by cathodoluminescence spectroscopy
Journal Title: Nano Express
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-12-17
Date Accepted: 2021-03-09
Online publication date: 2021-03-18