Bae, Hagyoul https://orcid.org/0000-0002-2462-4198
Charnas, Adam
Chung, Wonil
Si, Mengwei
Lyu, Xiao
Sun, Xing
Park, Joon
Wang, Haiyan https://orcid.org/0000-0002-7397-1209
Zemlyanov, Dmitry https://orcid.org/0000-0002-1221-9195
Ye, Peide D
Funding for this research was provided by:
Semiconductor Research Corporation
Article Title: Ultrathin transparent Copper(I) oxide films grown by plasma-enhanced atomic layer deposition for Back-end-of-line p-Type transistors
Journal Title: Nano Express
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-02-13
Date Accepted: 2021-05-13
Online publication date: 2021-06-10