Kim, Hyungwoo http://orcid.org/0000-0003-4760-9035
Kashir, Alireza
Jang, Hojung
Oh, Seungyeol http://orcid.org/0000-0002-6848-0229
Yadav, Manoj
Lee, Seungwoo
Hwang, Hyunsang
Funding for this research was provided by:
National Research Foundation of Korea (2018R1A3B1052693)
Article Title: Two-step deposition of TiN capping electrodes to prevent degradation of ferroelectric properties in an in-situ crystallized TiN/Hf0.5Zr0.5O2/TiN device
Journal Title: Nano Express
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-11-24
Date Accepted: 2022-03-08
Online publication date: 2022-03-16