Jang, Eungyo https://orcid.org/0009-0000-4189-9700
Lim, Jaehyuk https://orcid.org/0000-0003-1636-8865
Shin, Changhwan https://orcid.org/0000-0001-6057-3773
Funding for this research was provided by:
National Research Foundation of Korea (2020R1A2C1009063)
Article Title: Buried power rail to suppress substrate leakage in complementary field effect transistor (CFET)
Journal Title: Nano Express
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-09-17
Date Accepted: 2024-12-18
Online publication date: 2024-12-31