Terrasanta, G https://orcid.org/0000-0001-7542-1545
Müller, M https://orcid.org/0000-0002-8039-6265
Sommer, T https://orcid.org/0000-0002-6528-0985
Geprägs, S https://orcid.org/0000-0003-0985-2341
Gross, R https://orcid.org/0000-0003-4524-7552
Althammer, M https://orcid.org/0000-0003-1625-6054
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (291763)
Article Title: Growth of aluminum nitride on a silicon nitride substrate for hybrid photonic circuits
Journal Title: Materials for Quantum Technology
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-03-02
Date Accepted: 2021-06-07
Online publication date: 2021-06-21