Lozano, D P https://orcid.org/0000-0003-3098-3266
Mongillo, M
Piao, X
Couet, S
Wan, D
Canvel, Y
Vadiraj, A M
Ivanov, Ts
Verjauw, J
Acharya, R
Van Damme, J
Mohiyaddin, F A
Jussot, J
Gowda, P P
Pacco, A
Raes, B
Van de Vondel, J https://orcid.org/0000-0001-6894-7258
Radu, I P
Govoreanu, B
Swerts, J
Potočnik, A https://orcid.org/0000-0002-0352-6388
De Greve, K
Funding for this research was provided by:
ECSEL Joint Undertaking (101007322)
Article Title: Low-loss α-tantalum coplanar waveguide resonators on silicon wafers: fabrication, characterization and surface modification
Journal Title: Materials for Quantum Technology
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2023-12-31
Date Accepted: 2024-05-14
Online publication date: 2024-05-31