Kopas, Cameron J https://orcid.org/0000-0002-6184-2987
Goronzy, Dominic P https://orcid.org/0000-0003-2856-4732
Pham, Thang
Torres Castanedo, Carlos G https://orcid.org/0000-0002-4505-7970
Cheng, Matthew
Cochrane, Rory
Nast, Patrick
Lachman, Ella
Zhelev, Nikolay Z https://orcid.org/0000-0002-5344-6298
Vallières, André https://orcid.org/0000-0003-0769-8432
Murthy, Akshay A https://orcid.org/0000-0001-7677-6866
Oh, Jin-su https://orcid.org/0000-0002-7462-3142
Zhou, Lin https://orcid.org/0000-0003-2286-6510
Kramer, Matthew J https://orcid.org/0000-0002-9097-6730
Cansizoglu, Hilal
Bedzyk, Michael J https://orcid.org/0000-0002-1026-4558
Dravid, Vinayak P
Romanenko, Alexander
Grassellino, Anna
Mutus, Josh Y
Hersam, Mark C https://orcid.org/0000-0003-4120-1426
Yadavalli, Kameshwar
Funding for this research was provided by:
SHyNE Resource (NSF ECCS-2025633)
Northwestern MRSEC program (NSF DMR-2308691)
U.S. Department of Energy, Office of Science, National Quantum Information Science Research Centers, Su- perconducting Quantum Materials and Systems Center (DE-AC02-07CH11359)
Article Title: Enhanced superconducting qubit performance through ammonium fluoride etch
Journal Title: Materials for Quantum Technology
Article Type: paper
Copyright Information: © 2024 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-07-30
Date Accepted: 2024-10-18
Online publication date: 2024-11-05