Zhang, Lifei https://orcid.org/0000-0002-7790-9509
Lu, Xinchun
Funding for this research was provided by:
Tsinghua Initiative Scientific Research Program
National Natural Science Foundation of China (51991370)
Article Title: Atomic-scale chemical mechanical polishing: advances and challenges for the post-Moore’s law era
Journal Title: Materials Futures
Article Type: paper
Copyright Information: © 2026 The Author(s). Published by IOP Publishing Ltd on behalf of the Dongguan Institute of Materials Science and Technology, CAS
Publication dates
Date Received: 2025-09-24
Date Accepted: 2025-11-10
Online publication date: 2026-01-14