van der Horst, R M
Beckers, J
Osorio, E A
Banine, V Y
Funding for this research was provided by:
ASML BV, The Netherlands
Journal title: Journal of Physics D: Applied Physics
Article type: lett
Article title: Dynamics of the spatial electron density distribution of EUV-induced plasmas
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2015-08-17
Date accepted: 2015-09-03
Online publication date: 2015-10-02