Morozov, O
Postnikov, A
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Mechanical strength study of SiO2isolation blocks merged in silicon substrate
Copyright information: © 2015 IOP Publishing Ltd
Publication dates
Date received: 2014-10-07
Date accepted: 2014-10-31
Online publication date: 2014-12-30