de Laat, M L C
Pérez Garza, H H
Herder, J L
Ghatkesar, M K
Journal title: Journal of Micromechanics and Microengineering
Article type: rev
Article title: A review onin situstiffness adjustment methods in MEMS
Copyright information: © 2016 IOP Publishing Ltd
License information: cc-by Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication dates
Date received: 2015-08-20
Date accepted: 2016-04-01
Online publication date: 2016-05-09