Kawamura, E
Lichtenberg, A J
Lieberman, M A
Marakhtanov, A M
Funding for this research was provided by:
Lam Research Corporation (gift)
Fusion Energy Sciences (DE-SC0001939)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges
Copyright information: © 2016 IOP Publishing Ltd
Publication dates
Date received: 2015-11-19
Date accepted: 2016-03-10
Online publication date: 2016-04-06