Funding for this research was provided by:
National Nature Science Foundation of China (61774096)
Journal title: Journal of Micromechanics and Microengineering
Article type: paper
Article title: Low voltage, high speed and small area in-plane MEMS switch
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2018-12-12
Date accepted: 2019-04-04
Online publication date: 2019-05-10