Funding for this research was provided by:
Ministry of Education and Science of the Russian Federation (RFMEFI62119X0022)
Russian Foundation for Basic Research (18-29-20090)
Article Title: Optimization of x-ray lithography conditions for fabrication of large arrays of high-aspect-ratio submicron pores
Journal Title: Journal of Micromechanics and Microengineering
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2020-10-08
Date Accepted: 2021-03-29
Online publication date: 2021-04-13