Domínguez Bucio, Thalía
Khokhar, Ali Z
Lacava, Cosimo
Stankovic, Stevan
Mashanovich, Goran Z
Petropoulos, Periklis
Gardes, Frederic Y
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Material and optical properties of low-temperature NH3-free PECVD SiNxlayers for photonic applications
Copyright information: © 2016 IOP Publishing Ltd
License information: cc-by Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication dates
Date received: 2016-09-11
Date accepted: 2016-11-04
Online publication date: 2016-12-01