Vieker, Jochen
Bergmann, Klaus
Journal title: Journal of Physics D: Applied Physics
Article type: paper
Article title: Influence of the electrode wear on the EUV generation of a discharge based extreme ultraviolet light source
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-03-30
Date accepted: 2017-06-29
Online publication date: 2017-08-07