Funding for this research was provided by:
VINNOVA (2016-05156)
Carl Tryggers Stiftelse för Vetenskaplig Forskning (CTS 15:219, CTS 14:431)
German Research Foundation (DFG) (SFB-TR 87)
Knut och Alice Wallenbergs Stiftelse (KAW2016.0358)
Åforsk (16-359)
Journal title: Journal of Physics D: Applied Physics
Article type: lett
Article title: Substantial difference in target surface chemistry between reactive dc and high power impulse magnetron sputtering
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Publication dates
Date received: 2017-10-04
Date accepted: 2017-12-12
Online publication date: 2018-01-12