Cruz, J http://orcid.org/0000-0002-6478-0056
Sanginés, R http://orcid.org/0000-0003-2695-0955
Soto-Valle, G
Muhl, S http://orcid.org/0000-0001-7185-0537
Sierra, I
De Lucio-Morales, O http://orcid.org/0000-0003-1602-0017
Ruvalcaba, J L
Mitrani, A http://orcid.org/0000-0002-0877-5033
Calderón-Olvera, R M
Mendoza-Pérez, R
Machorro-Mejía, R
Funding for this research was provided by:
Dirección General de Asuntos del Personal Académico, Universidad Nacional Autónoma de México (PAPIIT-UNAM-IG101220)
Consejo Nacional de Ciencia y Tecnología (CB-2015-255156)
Article Title: Si sputtering yield amplification: a study of the collisions cascade and species in the sputtering plasma
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2020-07-25
Date Accepted: 2021-06-17
Online publication date: 2021-07-01