Ulm, Andreas http://orcid.org/0000-0002-2681-7890
Ahmed, Mirza Tareq http://orcid.org/0000-0003-4304-3978
Schmitt, Robert http://orcid.org/0000-0002-0011-5962
Article Title: Spatial light modulator-based maskless laser lithography using Fourier filtering and focal shift
Journal Title: Journal of Physics D: Applied Physics
Article Type: paper
Copyright Information: © 2022 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2022-10-06
Date Accepted: 2022-11-14
Online publication date: 2022-12-09