Funding for this research was provided by:
European Association of National Metrology Institutes (15SIB09 3DNano)
Article Title: Accurate tip characterization in critical dimension atomic force microscopy
Journal Title: Measurement Science and Technology
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd
Publication dates
Date Received: 2019-12-03
Date Accepted: 2020-03-13
Online publication date: 2020-04-30