Du, Ke http://orcid.org/0000-0003-2686-650X
Ding, Junjun http://orcid.org/0000-0002-7025-0617
Wathuthanthri, Ishan
Choi, Chang-Hwan http://orcid.org/0000-0003-2715-7393
Funding for this research was provided by:
U.S. Department of Energy (No. DE-AC02-98CH10886)
Journal title: Nanotechnology
Article type: paper
Article title: Selective hierarchical patterning of silicon nanostructures via soft nanostencil lithography
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-08-13
Date accepted: 2017-09-15
Online publication date: 2017-10-23