Park, Jin Woo
Kim, Doo San
Lee, Won Oh
Kim, Ju Eun
Yeom, Geun Young http://orcid.org/0000-0001-6603-2193
Funding for this research was provided by:
Nano Material Technology Development Program through the National Research Foundation Korea (NRF), funded by the Ministry of Education, Science, and Technology (2016M3A7B4910429)
National Research Foundation of Korea (NRF) grant funded by the Korea government (MSIT) (2018R1A2A3074950)
Journal title: Nanotechnology
Article type: paper
Article title: Atomic layer etching of chrome using ion beams
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-08-20
Date accepted: 2018-11-30
Online publication date: 2018-12-28