Kornbluth, Y S http://orcid.org/0000-0001-7813-3784
Mathews, R H
Parameswaran, L http://orcid.org/0000-0002-5566-9495
Racz, L M http://orcid.org/0000-0002-1876-8566
Velásquez-García, L F http://orcid.org/0000-0002-9232-1244
Funding for this research was provided by:
Assistant Secretary of Defense for Research and Engineering (FA8702-15-D-0001)
Journal title: Nanotechnology
Article type: paper
Article title: Room-temperature, atmospheric-pressure microsputtering of dense, electrically conductive, sub-100 nm gold films
Copyright information: © 2019 IOP Publishing Ltd
License information: cc-by Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication dates
Date received: 2018-12-19
Date accepted: 2019-03-22
Online publication date: 2019-04-24