Breilmann, W
Maszl, C
Keudell, A von
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Fast charge exchange ions in high power impulse magnetron sputtering of titanium as probes for the electrical potential
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-07-13
Date accepted: 2017-01-04
Online publication date: 2017-02-15