Hamilton, James R
Tennyson, Jonathan http://orcid.org/0000-0002-4994-5238
Huang, Shuo
Kushner, Mark J
Funding for this research was provided by:
Science and Technology Facilities Council (ST/K004069)
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Calculated cross sections for electron collisions with NF3, NF2and NF with applications to remote plasma sources
Copyright information: © 2017 IOP Publishing Ltd
License information: cc-by Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication dates
Date received: 2016-11-27
Date accepted: 2017-04-06
Online publication date: 2017-05-09