Leal, Ronan
Bruneau, Bastien
Bulkin, Pavel
Novikova, Tatiana http://orcid.org/0000-0002-9048-9158
Silva, François
Habka, Nada
Johnson, Erik V http://orcid.org/0000-0003-0920-2111
Funding for this research was provided by:
Agence Nationale de la Recherche (Chair Industriel PISTOL ANR-17-CHIN-0002-01)
Article Title: Maskless and contactless patterned silicon deposition using a localized PECVD process
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2019-07-09
Date Accepted: 2019-12-03
Online publication date: 2020-02-20