Funding for this research was provided by:
US Department of Energy (DE-SC0020232)
Lam Research Inc.
Samsung Electronics Co. Ltd
Journal title: Plasma Sources Science and Technology
Article type: paper
Article title: Transients using low-high pulsed power in inductively coupled plasmas
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2020-03-04
Date accepted: 2020-06-29
Online publication date: 2020-08-11