Kusch, Gunnar http://orcid.org/0000-0003-2743-1022
Mehnke, Frank
Enslin, Johannes
Edwards, Paul R http://orcid.org/0000-0001-7671-7698
Wernicke, Tim
Kneissl, Michael
Martin, Robert W http://orcid.org/0000-0002-6119-764X
Funding for this research was provided by:
Engineering and Physical Sciences Research Council (EP/M003132/1 EP/M015181/1)
Deutsche Forschungsgemeinschaft (03ZZ0103, 13N12587, 03ZZ0105B)
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Analysis of doping concentration and composition in wide bandgap AlGaN:Si by wavelength dispersive x-ray spectroscopy
Copyright information: © 2017 IOP Publishing Ltd
License information: cc-by Original content from this work may be used under the terms of the Creative Commons Attribution 3.0 licence. Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI.
Publication dates
Date received: 2016-09-16
Date accepted: 2017-01-11
Online publication date: 2017-02-13