Kim, Kyung Joong http://orcid.org/0000-0001-5559-9784
Kim, Tae Gun http://orcid.org/0000-0001-8754-7671
Kwon, Ji-Hwan
Ruh, Hyun
Park, Kyungsu
Min, Won Ja
Journal title: Metrologia
Article type: paper
Article title: Traceable thickness measurement of ultra-thin HfO2 films by medium-energy ion scattering spectroscopy
Copyright information: © 2020 BIPM & IOP Publishing Ltd
Publication dates
Date received: 2019-08-14
Date accepted: 2019-11-14
Online publication date: 2020-02-12