Xue, Wenjin
Miller, Owen D http://orcid.org/0000-0003-2745-2392
Funding for this research was provided by:
Air Force Office of Scientific Research (FA9550-17-1-009)
Article Title: High-NA optical edge detection via optimized multilayer films
Journal Title: Journal of Optics
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2021-07-22
Date Accepted: 2021-11-05
Online publication date: 2021-11-19