Funding for this research was provided by:
European Union’s Horizon 2020 research and innovation programme (825503)
Photonics 21 (825503)
Article Title: Scatterometry and diffractometry techniques to monitor surfaces textured by rapid ultra-short pulse laser
Journal Title: Journal of Physics: Photonics
Article Type: paper
Copyright Information: © 2020 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2019-12-30
Date Accepted: 2020-05-13
Online publication date: 2020-06-26