Sugioka, Koji
Journal title: International Journal of Extreme Manufacturing
Article type: rev
Article title: Hybrid femtosecond laser three-dimensional micro-and nanoprocessing: a review
Copyright information: © 2019 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
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Publication dates
Date received: 2019-03-12
Date accepted: 2019-03-12
Online publication date: 2019-04-12