Zhang, Dongshi http://orcid.org/0000-0003-4425-2704
Wu, Liang-Chun
Ueki, Masashi
Ito, Yoshihiro http://orcid.org/0000-0002-1154-253X
Sugioka, Koji http://orcid.org/0000-0002-7174-5961
Funding for this research was provided by:
RIKEN FY2019 "Emerging Collaboration Seed" of “Collaboration Seed Fund” (100948-201901010000-340130)
Article Title: Femtosecond laser shockwave peening ablation in liquids for hierarchical micro/nanostructuring of brittle silicon and its biological application
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: 2020 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2020-04-14
Date Accepted: 2020-09-07
Online publication date: 2020-10-01