Chen, Yiqin
Shu, Zhiwen
Zhang, Shi
Zeng, Pei
Liang, Huikang
Zheng, Mengjie
Duan, Huigao http://orcid.org/0000-0001-9144-2864
Funding for this research was provided by:
Guangdong Basic Research Foundation (2020A1515110971)
National Key Research and Development Program of China (2018YFE0109200)
National Natural Science Foundation of China (51722503)
Article Title: Sub-10 nm fabrication: methods and applications
Journal Title: International Journal of Extreme Manufacturing
Article Type: paper
Copyright Information: © 2021 The Author(s). Published by IOP Publishing Ltd on behalf of the IMMT
Publication dates
Date Received: 2021-02-21
Date Accepted: 2021-06-04
Online publication date: 2021-07-01