Gong, Yukun https://orcid.org/0000-0001-6860-3893
Akolkar, Rohan https://orcid.org/0000-0002-9865-5704
Funding for this research was provided by:
National Science Foundation (1661565)
Article Title: Electrochemical Atomic Layer Etching of Ruthenium
Journal Title: Journal of The Electrochemical Society
Article Type: paper
Copyright Information: © 2020 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2020-03-05
Date Accepted:
Online publication date: 2020-04-14