Matsumoto, Ayumu https://orcid.org/0000-0002-4077-6757
Furukawa, Kyohei
Majima, Shun
Iwamoto, Keishi
Yae, Shinji https://orcid.org/0000-0003-1181-4811
Funding for this research was provided by:
Japan Society for the Promotion of Science (JP19K05082)
Article Title: Electrochemical Investigation of the Effect of Hydrogen Peroxide Concentration on Platinum-Particle-Assisted Etching of p-Type Silicon in a Hydrofluoric Acid Solution
Journal Title: Journal of The Electrochemical Society
Article Type: paper
Copyright Information: © 2021 The Author(s). Published on behalf of The Electrochemical Society by IOP Publishing Limited
Publication dates
Date Received: 2021-08-18
Date Accepted:
Online publication date: 2021-11-08