Yang, Xiaozhe https://orcid.org/0000-0003-0600-104X
Yang, Xu
Gu, Haiyang
Kawai, Kentaro
Arima, Kenta
Yamamura, Kazuya
Article Title: Charge Utilization Efficiency and Side Reactions in the Electrochemical Mechanical Polishing of 4H-SiC (0001)
Journal Title: Journal of The Electrochemical Society
Article Type: paper
Copyright Information: © 2022 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2021-10-13
Date Accepted:
Online publication date: 2022-02-01