Yang, Xiaozhe https://orcid.org/0000-0003-0600-104X
Yang, Xu
Gu, Haiyang
Kawai, Kentaro
Arima, Kenta
Yamamura, Kazuya
Article Title: Charge Utilization Efficiency and Side Reactions in the Electrochemical Mechanical Polishing of 4H-SiC (0001)
Journal Title: Journal of The Electrochemical Society
Article Type: paper
Copyright Information: © 2022 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date Received: 2021-10-13
Date Accepted:
Online publication date: 2022-02-01