Mori, Tatsuhiko
Kurioka, Tomoyuki https://orcid.org/0000-0003-0650-9417
Chen, Chun-Yi
Chang, Tso-Fu Mark https://orcid.org/0000-0003-0221-8882
Machida, Katsuyuki
Ito, Hiroyuki
Miyake, Yoshihiro
Sone, Masato
Funding for this research was provided by:
Core Research for Evolutional Science and Technology (JPMJCR21C5)
Article Title: Evaluation of the Annealing Induced Warpage of an Electrodeposited-Au Octagonal Proof Mass with a Ti/Au Multi-Layered Structure toward MEMS Capacitive Accelerometers
Journal Title: Journal of The Electrochemical Society
Article Type: paper
Copyright Information: © 2025 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2025-07-28
Date Accepted: 2025-10-10
Online publication date: 2025-10-23