Mariscal, Juan Cristobal
Sampurno, Yasa
Slutz, Dave
Philipossian, Ara
Journal title: ECS Journal of Solid State Science and Technology
Article type: paper
Article title: Effect of Various CVD-Coated Conditioning Disc Designs and Polisher Kinematics on Fluid Flow Characteristics during CMP
Copyright information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date received: 2019-10-21
Online publication date: 2020-01-21