Frank, C. https://orcid.org/0000-0001-6605-4966
Headley, R. https://orcid.org/0000-0003-2723-3704
Sampurno, Y. https://orcid.org/0000-0003-3716-5047
Philipossian, A.
Article Title: Correlating Shear Force and Coefficient of Friction to Platen Motor Current in Copper, Cobalt, and Shallow Trench Isolation Chemical Mechanical Planarization at Steady-State Conditions
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-12-12
Date Accepted:
Online publication date: 2020-02-03