Frank, C. https://orcid.org/0000-0001-6605-4966
Headley, R. https://orcid.org/0000-0003-2723-3704
Sampurno, Y. https://orcid.org/0000-0003-3716-5047
Philipossian, A.
Journal title: ECS Journal of Solid State Science and Technology
Article type: paper
Article title: Correlating Shear Force and Coefficient of Friction to Platen Motor Current in Copper, Cobalt, and Shallow Trench Isolation Chemical Mechanical Planarization at Steady-State Conditions
Copyright information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date received: 2019-12-12
Online publication date: 2020-02-03