Takigawa, Ryo https://orcid.org/0000-0002-6846-2151
Matsumae, Takashi https://orcid.org/0000-0001-5767-8398
Yamamoto, Michitaka
Higurashi, Eiji
Asano, Tanemasa
Kanaya, Haruichi
Funding for this research was provided by:
JSPS KAKENHI (JP17H04925)
Article Title: Demonstration of GaN/LiNbO 3 Hybrid Wafer Using Room-Temperature Surface Activated Bonding
Journal Title: ECS Journal of Solid State Science and Technology
Article Type: paper
Copyright Information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-10-30
Date Accepted: 2020-03-24
Online publication date: 2020-04-23