Mariscal, Juan Cristobal https://orcid.org/0000-0001-7956-6223
McAllister, Jeffrey
Sampurno, Yasa
Suarez, Jon Sierra
O’Neill, Mark
Zhou, Hongjun
Grief, Malcolm
Slutz, Dave
Philipossian, Ara
Journal title: ECS Journal of Solid State Science and Technology
Article type: paper
Article title: Tribological, Thermal and Kinetic Characterization of SiO2and Si3N4Polishing for STI CMP on Blanket and Patterned Wafers
Copyright information: © 2020 The Electrochemical Society (“ECS”). Published on behalf of ECS by IOP Publishing Limited
Publication dates
Date received: 2020-03-10
Online publication date: 2020-05-04